Publications
Journals - Conference Articles - Grants - Patents - Pre-Grant Patent Publications
Journals
- J.A. Kubby, Hybrid silicon-on-insulator micromachining for critical MEMS components, Solid State Technology, Vol. 47, Issue 9, September 2004.
- F. Pan, J. Kubby, and J. Chen, Numerical simulation of fluid-structure interaction in a MEMS diaphragm drop ejector, J. Micromech. Microeng. 12 p. 70 (2002).
- Feixia Pan, Joel Kubby, Eric Peeters, Alex T Tran and Subrata Mukherjee, Squeeze film damping effect on the dynamic response of a MEMS torsion mirror, J. Micromech. Microeng. 8, pp. 200-208 (1998).